By Mohamed Gad-el-Hak
As our wisdom of microelectromechanical platforms (MEMS) keeps to develop, so does The MEMS guide. the sphere has replaced loads that this moment variation is now to be had in 3 volumes. separately, every one quantity offers concentrated, authoritative remedy of particular parts of curiosity. jointly, they contain the main complete number of MEMS wisdom on hand, packaged in an enticing slipcase and provided at a considerable discounts. This best-selling guide is now less difficult than ever, and its insurance is remarkable. the second one quantity, MEMS: layout and Fabrication, information the options, applied sciences, and fabrics all for designing and fabricating MEMS units. It starts off with an outline of MEMS fabrics after which examines intimately a number of fabrication and production equipment, together with LIGA and macromolding, X-ray dependent fabrication, EFAB® know-how, and deep reactive ion etching. This booklet comprises 3 new chapters on polymeric-based sensors and actuators, diagnostic instruments, and molecular self-assembly. it's a thorough advisor to the $64000 features of layout and fabrication. MEMS: layout and Fabrication includes contributions from the most important specialists of their respective specialties from around the globe. Acclaimed writer and specialist Mohamed Gad-el-Hak has back raised the bar to set a brand new ordinary for excellence and authority within the fledgling fields of MEMS and nanotechnology.